Founded in 2004, this family business has developed into a leading and globally active company in recent years. The Fäth Group has firmly established itself on the international stage with customized solutions in the areas of development, production, qualification and analysis of gas and chemical supply systems. With more than 600 employees at 8 different global locations.
OptiFab are the exclusive UK sales representative for the AERION®, PURAS® and HighQ® systems. AERION® process gas control cabinets for the safe management and distribution of high purity and hazardous process gases, and the PURAS® range safely manages the wet chemistries required for CMP and wet etch applications.
The HighQ® solutions provide CMP slurry recycling and wastewater solutions, enabling valuable resources to be reclaimed and reused.
All of these solutions have safety and purity at the foundation of their design, and this philosophy continues through the build, test and validation stages; delivering solutions trusted by wafer fabs and research facilities around the world.
Fäth’s process systems include:
Puras® process systems for safe chemical management
The task of PURAS® Chemical Support System is to ensure the safe, reliable, and efficient supply of ultrapure chemicals. PURAS® solutions guarantee a continuous and reliable supply of chemicals, assuring your plant always having the chemicals available to maintain operation, and avoid costly production downtimes.
For CMP and wet etch, there are solutions covering the full range of requirements. From single drum ultrapure management and delivery, to dosing and changeover systems, including systems that offer constant pressure and flow, with no bubble generation, for critical process applications; the PURAS® portfolio covers these requirements.
Datasheet downloads
Aerion® process systems for safe and pure semiconductor gas management
AERION® gas supply systems ensure safe, reliable, and efficient delivery of process gases to all required points of use. They optimise operations, enhance workplace safety, and reduce the risk of gas-related incidents. The modular design of AERION® systems allows flexible configuration to meet specific application requirements. With strict safety standards, Fäth ensures the safe handling of hazardous, flammable, pyrophoric, toxic, and corrosive gases. To ensure the highest yields downstream, each AERION® system is qualified and certified for particle count along with humidity and oxygen testing down to single ppb levels. Whether it’s an etch, implant or deposition process, your source process gas purity and safety is assured.
HighQ® CMP slurry recycling systems
HighQ® CMP slurry recycling systems for the reclamation of slurry, water, and valuable raw materials. The Fäth Group was the world’s first company developing a patented recycling plant, enabling the recovery of ultrapure water and raw chemical materials by ultrafiltration processes. A mixture of wastewater and chemicals is fed to the recycling plant. Utilising several complex filtration and ultrafiltration stages, the mixture of water and chemicals is separated and the slurry can be reintroduced back into the production process. Up to 65% of the slurry and up to 90% of the water can be recovered. With a strong ROI, the HighQ® slurry recycling solution also provides a high level of sustainability and environmental compliance whilst recovering valuable resources.
HighQ® Wastewater treatment for laboratories and industry
HighQ® Wastewater treatment for laboratories and industry. Expertise in sustainable water treatment for efficient solutions, the Fäth Group offers customized complete systems for water technology processes, from laboratory to fully automated production systems. With solutions in micro, ultra and nanofiltration as well as reverse osmosis; precise, scalable filtration technologies are developed that are optimally tailored to the requirements of your industrial process. If you’re running back wafer grinding or wafer saw / dicing processes and want to remove the solid waste material from your wastewater stream, the HighQ® wastewater solutions provide a sustainable and environmentally compliant solution.
For further information on the Fäth Group, please visit https://www.faeth.com/en/
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